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Submicron Structures with Deep Relief — Technology of Preparation
Matějka, Milan ; Kuřitka,, Ivo (referee) ; Mgr. Petr Klapetek Ph.D (referee) ; Kolařík, Vladimír (advisor)
The dissertation thesis is focused on research and development in the field of microfabrication by the technology of electron beam lithography. In the first part of this work, the extensive study is conducted in the field of technology of electron beam lithography in terms of physical principles, writing strategies and resist materials. This is followed with description of physical principles of etching for the transfer of relief structures into substrates. The thesis describes innovative techniques in modelling, simulation, data preparation and optimization of manufacturing technology. It brings new possibilities to record deep binary or multilevel microstructures using electron beam lithography, plasma and reactive ion etching technology. Experience and knowledge in the large area of microlithography, plasma and anisotropic wet-etching of silicon have been capitalized to the design process of manufacturing of nano-patterned membranes. It was followed with practical verification and optimization of the microfabrication process.
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Gas Microsensors Based on Self-Organized 3D Metal-Oxide Nanofilms
Pytlíček, Zdeněk ; Husák, Miroslav (referee) ; Kolařík, Vladimír (referee) ; Prášek, Jan (advisor)
This dissertation concerns the development, fabrication and integration in a gas sensing microdevice of a novel 3-dimensional (3D) nanostructured metal-oxide semiconducting film that effectively merges the benefits of inorganic nanomaterials with the simplicity offered by non-lithographic electrochemistry-based preparation techniques. The film is synthesized via the porous-anodic-alumina-assisted anodizing of an Al/Nb metal bilayer sputter-deposited on a SiO2/Si substrate and is basically composed of a 200 nm thick NbO2 layer holding an array of upright-standing spatially separated Nb2O5 nanocolumns, being 50 nm wide, up to 900 nm long and of 8109 cm2 population density. The nanocolumns work as semiconducting nano-channels, whose resistivity is greatly impacted by the surface and interface reactions. Either Pt or Au patterned electrodes are prepared on the top of the nanocolumn array using an innovative sensor design realized by means of microfabrication technology or via a direct original point electrodeposition technique, followed by selective dissolution of the alumina overlayer. For gas-sensing tests the film is mounted on a standard TO-8 package using the wire-bonding technique. Electrical characterization of the 3D niobium-oxide nanofilm reveals asymmetric electron transport properties due to a Schottky barrier that forms at the Au/Nb2O5 or Pt/Nb2O5 interface. Effects of the active film morphology, structure and composition on the electrical and gas-sensing performance focusing on sensitivity, selectivity, detection limits and response/recovery rates are explored in experimental detection of hydrogen gas and ammonia. The fast and intensive response to H2 confirms the potential of the 3D niobium-oxide nanofilm as highly appropriate active layer for sensing application. A computer-aided microfluidics simulation of gas diffusion in the 3D nanofilm predicts a possibility to substantially improve the gas-sensing performance through the formation of a perforated top electrode, optimizing the film morphology, altering the crystal structure and by introducing certain innovations in the electrode design. Preliminary experiments show that a 3D nanofilm synthesized from an alternative Al/W metal bilayer is another promising candidate for advanced sensor applications. The techniques and materials employed in this work are advantageous for developing technically simple, cost-effective and environmentally friendly solutions for practical micro- and nanodevices, where the well-defined nano-channels for charge carriers and surface reactions may bring unprecedented benefits.
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Terahertz Antenna Arrays for Communications
Warmowska, Dominika ; Joler, Miroslav (referee) ; Pokorný, Michal (referee) ; Raida, Zbyněk (advisor)
The thesis is focused on the research of THz antenna arrays to be used for communications. Attention is turned to modeling metallic surfaces at THz frequencies, a proper characterization of gold conductivity, its relation to Drude model and corresponding measurements. Moreover, the best methods for modeling thin metallic layers (depending on the skin depth related to the metal thickness) are presented. An optimized element of a THz 2×2 antenna array designed for the application of communications is developed in a way that enables an expansion to a larger array. The expansion ability is demonstrated on a 4×4 antenna array which is presented in the thesis too. The designed antennas achieve parameters better than the state-of-art antennas. The presented antennas radiate circularly polarized wave at THz frequencies, operate in a wide bandwidth, have a high gain and are of a compact size. In the thesis, an 8×8 antenna array with a beam steering capability is presented. The main beam of the antenna array can be controlled in two dimensions. A high gain of the radiated circularly-polarized wave can be achieved that way. Different approaches to modeling antennas with thin metallic layers are compared and the best methods are recommended from the viewpoint of different requirements. The designed 2×2 and 4×4 antenna arrays are manufactured using a microfabrication technology. Each step of the fabrication is described in detail and discussed. The reflection coefficient at the input of antennas is measured and compared with simulations. Discrepancies in results are associated with surface roughness which is analyzed by a scanning probe microscope and a scanning electron microscope. By down-scaling the developed THz antenna, a low-profile high-gain antenna for Ka-band space applications is designed. The presented antenna achieves better results than state-of-art CubeSat antennas. The antenna performance is verified by a prototype to be operated at 9 GHz, and the radiation characteristics are experimentally confirmed.
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Terahertz Antenna Arrays for Communications
Warmowska, Dominika ; Joler, Miroslav (referee) ; Pokorný, Michal (referee) ; Raida, Zbyněk (advisor)
The thesis is focused on the research of THz antenna arrays to be used for communications. Attention is turned to modeling metallic surfaces at THz frequencies, a proper characterization of gold conductivity, its relation to Drude model and corresponding measurements. Moreover, the best methods for modeling thin metallic layers (depending on the skin depth related to the metal thickness) are presented. An optimized element of a THz 2×2 antenna array designed for the application of communications is developed in a way that enables an expansion to a larger array. The expansion ability is demonstrated on a 4×4 antenna array which is presented in the thesis too. The designed antennas achieve parameters better than the state-of-art antennas. The presented antennas radiate circularly polarized wave at THz frequencies, operate in a wide bandwidth, have a high gain and are of a compact size. In the thesis, an 8×8 antenna array with a beam steering capability is presented. The main beam of the antenna array can be controlled in two dimensions. A high gain of the radiated circularly-polarized wave can be achieved that way. Different approaches to modeling antennas with thin metallic layers are compared and the best methods are recommended from the viewpoint of different requirements. The designed 2×2 and 4×4 antenna arrays are manufactured using a microfabrication technology. Each step of the fabrication is described in detail and discussed. The reflection coefficient at the input of antennas is measured and compared with simulations. Discrepancies in results are associated with surface roughness which is analyzed by a scanning probe microscope and a scanning electron microscope. By down-scaling the developed THz antenna, a low-profile high-gain antenna for Ka-band space applications is designed. The presented antenna achieves better results than state-of-art CubeSat antennas. The antenna performance is verified by a prototype to be operated at 9 GHz, and the radiation characteristics are experimentally confirmed.
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Gas Microsensors Based on Self-Organized 3D Metal-Oxide Nanofilms
Pytlíček, Zdeněk ; Husák, Miroslav (referee) ; Kolařík, Vladimír (referee) ; Prášek, Jan (advisor)
This dissertation concerns the development, fabrication and integration in a gas sensing microdevice of a novel 3-dimensional (3D) nanostructured metal-oxide semiconducting film that effectively merges the benefits of inorganic nanomaterials with the simplicity offered by non-lithographic electrochemistry-based preparation techniques. The film is synthesized via the porous-anodic-alumina-assisted anodizing of an Al/Nb metal bilayer sputter-deposited on a SiO2/Si substrate and is basically composed of a 200 nm thick NbO2 layer holding an array of upright-standing spatially separated Nb2O5 nanocolumns, being 50 nm wide, up to 900 nm long and of 8109 cm2 population density. The nanocolumns work as semiconducting nano-channels, whose resistivity is greatly impacted by the surface and interface reactions. Either Pt or Au patterned electrodes are prepared on the top of the nanocolumn array using an innovative sensor design realized by means of microfabrication technology or via a direct original point electrodeposition technique, followed by selective dissolution of the alumina overlayer. For gas-sensing tests the film is mounted on a standard TO-8 package using the wire-bonding technique. Electrical characterization of the 3D niobium-oxide nanofilm reveals asymmetric electron transport properties due to a Schottky barrier that forms at the Au/Nb2O5 or Pt/Nb2O5 interface. Effects of the active film morphology, structure and composition on the electrical and gas-sensing performance focusing on sensitivity, selectivity, detection limits and response/recovery rates are explored in experimental detection of hydrogen gas and ammonia. The fast and intensive response to H2 confirms the potential of the 3D niobium-oxide nanofilm as highly appropriate active layer for sensing application. A computer-aided microfluidics simulation of gas diffusion in the 3D nanofilm predicts a possibility to substantially improve the gas-sensing performance through the formation of a perforated top electrode, optimizing the film morphology, altering the crystal structure and by introducing certain innovations in the electrode design. Preliminary experiments show that a 3D nanofilm synthesized from an alternative Al/W metal bilayer is another promising candidate for advanced sensor applications. The techniques and materials employed in this work are advantageous for developing technically simple, cost-effective and environmentally friendly solutions for practical micro- and nanodevices, where the well-defined nano-channels for charge carriers and surface reactions may bring unprecedented benefits.
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Submicron Structures with Deep Relief — Technology of Preparation
Matějka, Milan ; Kuřitka,, Ivo (referee) ; Mgr. Petr Klapetek Ph.D (referee) ; Kolařík, Vladimír (advisor)
The dissertation thesis is focused on research and development in the field of microfabrication by the technology of electron beam lithography. In the first part of this work, the extensive study is conducted in the field of technology of electron beam lithography in terms of physical principles, writing strategies and resist materials. This is followed with description of physical principles of etching for the transfer of relief structures into substrates. The thesis describes innovative techniques in modelling, simulation, data preparation and optimization of manufacturing technology. It brings new possibilities to record deep binary or multilevel microstructures using electron beam lithography, plasma and reactive ion etching technology. Experience and knowledge in the large area of microlithography, plasma and anisotropic wet-etching of silicon have been capitalized to the design process of manufacturing of nano-patterned membranes. It was followed with practical verification and optimization of the microfabrication process.
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Biosensors for Environmental Monitoring and Biomedical Applications
ŠTOFIK, Marcel
Study of biosensors has become an essential part of research in biotechnology. Biosensors as fast, portable, highly sensitive, and low-cost bioanalytical detection devices have been utilized in many fields of human activity. The first part of the presented work focuses on electrochemical biosensors for rapid environmental screening of herbicides as water pollutants. A sol-gel immobilization method for a photosystem II (PSII) complex is studied in order to enhance the sensitivity and the signal strength and stability of a PSII-based biosensor. Computer simulations of a PSII biosensor are employed with the aim to find out how the immobilization membrane properties influence the biosensor parameters. Newly developed immobilization by a thin-layer membrane based on the results of computer simulations and revised measurement protocols are presented. The second part of the work is devoted to synthesis and electrochemical detection of newly developed metal labels for electrochemical immunosensors. The synthesis of dendrimer-encapsulated silver nanoparticles and biorecognition properties of biotin-nanocomposite conjugates are discussed. For detection of synthesized labels, a microfluidic detector was manufactured and tested and different approaches to packing of a microfluidic chip employing polydimethylsiloxane (PDMS) were investigated. Newly designed microstructures for a microfluidic separator of magnetic beads (MBs) were studied by computer simulations. The separator was made and trapping of MBs for the further employment in MBs-based immunoassays are presented
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Photolithographic technique for controlled fabrication of metal structures
Jusková, Petra ; Hegrová, Jitka ; Foret, František
We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer.
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